This paper considers capabilities of vacuum modification optical materials with application rare-earth elements and manufacturing procedures of optical materials with high concentration erbium active ions. Recently, the problem of increasing concentrations erbium active ions in rare-earth elements doped optical amplifiers without decreasing of their quantum efficiency, gets a major actually. Achievement in the field of ionic-plasma vacuum processing techniques allows practical possibility to establish new generation effective optical amplifiers with extremely high (> 1020 sm-3) concentration of rare-earth elements. On basis the technology of vacuum thermal deposition and vacuum synthesis, Er2O3 - SiOx - Al2O3 multicomponent planar light guide has been manufactured. The multicomponent planar light guide is created on local segment of an optical fiber core. The erbium ion concentration spans from 1019 to 8
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