Volume 28, Issue 1, December 2019, Pages 322–332
Mohamed El Haim1, Mohamed Atounti2, and Mohamed El Bojaddaini3
1 Department of Civil Engineering, Energetic and Environment, Team of Modeling, Optimization and Structure Dynamics in Civil Engineering, Laboratory of Applied Sciences, Abdelmalek Essaadi University, National School of Applied Sciences, Al Hoceima, Morocco
2 Department of Mathematics and Computer Sciences, Laboratory of Applied Mathematics and Information Systems, Mohammed Ist University, Multidisciplinary Faculty, Nador, Morocco
3 Department of Physics, Laboratory of Physics of Matter and Radiation, Mohammed Ist University, Faculty of Sciences, Oujda, Morocco
Original language: English
Copyright © 2019 ISSR Journals. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
This paper presents the numerical method used to solve the nonlinear plasma fluid equations. We have developed a fluid plasma model for a microwave plasma CVD reactor used for diamond thin film deposition. This model solves the electron and ion continuity equations, momentum transport equation and the Poisson's equation. In these equations we have the problem of non-linearity which is solved using the Newton’s method. From these equations, the unknowns computed are electron and ion densities (ne,ni), and plasma potential (ψ). Then the impacts of the hydrogen pressure and microwave power density have been studied. Simulation results show a strong effect of these parameters on the species densities distribution in the plasma.
Author Keywords: Numerical method, fluid plasma model, microwave plasma CVD reactor, Newton Raphson’s method, Finite difference method.
Mohamed El Haim1, Mohamed Atounti2, and Mohamed El Bojaddaini3
1 Department of Civil Engineering, Energetic and Environment, Team of Modeling, Optimization and Structure Dynamics in Civil Engineering, Laboratory of Applied Sciences, Abdelmalek Essaadi University, National School of Applied Sciences, Al Hoceima, Morocco
2 Department of Mathematics and Computer Sciences, Laboratory of Applied Mathematics and Information Systems, Mohammed Ist University, Multidisciplinary Faculty, Nador, Morocco
3 Department of Physics, Laboratory of Physics of Matter and Radiation, Mohammed Ist University, Faculty of Sciences, Oujda, Morocco
Original language: English
Copyright © 2019 ISSR Journals. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract
This paper presents the numerical method used to solve the nonlinear plasma fluid equations. We have developed a fluid plasma model for a microwave plasma CVD reactor used for diamond thin film deposition. This model solves the electron and ion continuity equations, momentum transport equation and the Poisson's equation. In these equations we have the problem of non-linearity which is solved using the Newton’s method. From these equations, the unknowns computed are electron and ion densities (ne,ni), and plasma potential (ψ). Then the impacts of the hydrogen pressure and microwave power density have been studied. Simulation results show a strong effect of these parameters on the species densities distribution in the plasma.
Author Keywords: Numerical method, fluid plasma model, microwave plasma CVD reactor, Newton Raphson’s method, Finite difference method.
How to Cite this Article
Mohamed El Haim, Mohamed Atounti, and Mohamed El Bojaddaini, “Numerical Study of Plasma Transport Equations,” International Journal of Innovation and Applied Studies, vol. 28, no. 1, pp. 322–332, December 2019.
