The paper investigates the design process and the analysis of a two degree of freedom compliant mechanism for nano scale positioning applications. In this research, the flexure based mechanism possesses a decoupled characteristic in x-and y motions and compact structure in size. Moreover, the mechanism's workspace will be amplified via using a lever amplification mechanism. In order to achieve an optimal size, a multiple objective optimization based on response surface method and kigring regression model are carried out. Besides, the effect of design variables on each of the output response of the proposed mechanism will analyzed as well. The proposed 2-DOF compliant mechanism size of 186 mm ? 186 mm possessed the workspace of 130 ?m ? 130 ?m in the x-and y axes. The confirmation experiment using a simulation in ANSYS revealed that the error between the predicted result and the actual value was about 1.6%. It means that there is a good agreement between two results. It is also clear that the proposed mechanism has much lower error than that of previous studies in the literature review. Ultimately, the proposed mechanism is expected to further applications in practice positioning and manipulator systems.

The study aims to investigate the development and the optimization of a compliant clamp in accuracy high required robotic mechanisms. In this research, a compliant clamp is developed based on flexure hinges to offer the flexibility of movement. Firstly, Solidwork software is used to create a compliant clamp model. Next, a finite element analysis (FEA) is performed using ANSYS software to explore the deformation behavior and stress distribution. The stress and the displacement of the mechanism are two important objective functions considering simultaneously to find the best optimal dimension of flexure hinges. Finally, to improve the strength and increase movement capacity (i.e. how to minimize the stress and maximize the displacement of this mechanism simultaneously), the fuzzy logic reasoning combined with Taguchi method that is proposed in this paper for multiple quality optimization problem. The results reveal that the proposed clamp has the mechanical advantages and the optimal dimension of proposed flexure hinge is the length of 15 mm, the width of 6 mm, and the thickness of 1mm. Therefore, the strength of suggested compliant clamp was improved. It is expected to used in robotic industry and other fields.